Boost in THz mobility in UMG silicon treated by phosphorous diffusion gettering

Autor:	Sergio Revuelta, Nerea Dasilva, David Fuertes Marrón, Carlos del Cañizo, Enrique Cánovas
Rok vydání:	2022
Zdroj:	Optica Advanced Photonics Congress 2022.
Popis:	By means of Terahertz Spectroscopy we demonstrate a boost in charge carrier mobility in upgraded-metallurgical grade silicon wafers treated by phosphorous diffusion gettering. Mobilities parallel those of high quality poly-Si.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6ac2b79ca99dc30d845854d459893da3 https://doi.org/10.1364/bgppm.2022.jtu2a.14 Zobrazit plný text záznamu