Advanced semiconductor on insulator substrates for LP and HP digital CMOS applications

Autor: Carlos Mazure, I. Cayrefourcq, George K. Celler, Bich-Yen Nguyen, P. Patruno
Rok vydání: 2007
Předmět:
Zdroj: 2007 International Semiconductor Device Research Symposium.
DOI: 10.1109/isdrs.2007.4422440
Popis: To meet HP and LP circuit requirements, increasing channel mobility is required to boost transistor performance and/or reduce Vdd for lower power dissipation without performance penalty. The ultra-thin body (UTB) devices with undoped and strained channels can be used to control the SCE and reduce the sub-threshold leakage for scaling and low power dissipation. Implementing strained-silicon is not just a substrate change; strained- Si will require much more extensive work as transistor scaling continues.
Databáze: OpenAIRE