The Effects of Titanium Silicide Formation on Dopant Redistribution

Autor:	T. Brat, S. Corcoran, Carlton M. Osburn, Nalin R. Parikh, Wei-Kan Chu, S. Lin, D. P. Griffis, D. Sharma
Rok vydání:	1988
Předmět:	Dopant Impurity diffusion Renewable Energy Sustainability and the Environment Chemistry Materials Chemistry Electrochemistry Analytical chemistry Titanium silicide Physical chemistry Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of The Electrochemical Society. 135:1490-1504
ISSN:	1945-7111 0013-4651
DOI:	10.1149/1.2096041
Popis:	Etude de la redistribution du bore et de l'arsenic pendant la technologie auto-alignee de formation de TiSi 2 appliquee aux jonctions peu profondes (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6a7894f59731d4697c2a6abfd1e5aa61 https://doi.org/10.1149/1.2096041 Zobrazit plný text záznamu