Conformal Growth of Hexagonal Boron Nitride on High-Aspect-Ratio Silicon-Based Nanotrenches
Autor: | Jiye Kim, Kyung-Yeon Doh, Seokho Moon, Chang-Won Choi, Hokyeong Jeong, Jaewon Kim, Wonseok Yoo, Kyungwook Park, Kyeongock Chong, Chunhyng Chung, Hanmei Choi, Si-Young Choi, Donghwa Lee, Jong Kyu Kim |
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Rok vydání: | 2023 |
Předmět: | |
Zdroj: | Chemistry of Materials. 35:2429-2438 |
ISSN: | 1520-5002 0897-4756 |
Databáze: | OpenAIRE |
Externí odkaz: |