Analysis of Electron Temperature in DC Ar/SF6 Plasma Using Cylindrical and Planar Probes

Autor:	Jinwoo Kim, Min-Keun Bae, Hyung-Jin Kim, Tae Hun Chung, Kyu-Sun Chung, Soon-Gook Cho
Rok vydání:	2013
Předmět:	Argon Plasma parameters Chemistry Direct current General Engineering General Physics and Astronomy Electron temperature chemistry.chemical_element Plasma Electron Electric current Atomic physics Ion
Zdroj:	Japanese Journal of Applied Physics. 52:11NC03
ISSN:	1347-4065 0021-4922
Popis:	Electronegative plasmas are generated by adding SF6 gas to a background argon (Ar) DC plasma with parameters of n 0 = 1×1010 cm3 and T e = 2 eV. The heating current of the thoriated filament was in the range of 20.5–21.5 A and the plasmas were generated under a discharge condition of 100 V/0.4 A. The amount of negative ions was controlled by adjusting the ratio of flow rate of SF6 = 0–10% to that of Ar. Plasma parameters were measured using cylindrical and planar electric probes. The behavior of electrons, which means the change in a parameter due to negative ion production, is characterized by measuring the floating and plasma potentials, and electron temperature. Electron temperature seems to increase and the potentials decrease with SF6 flow rate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6a39a38c31bf343e8bee18bab947fc98 https://doi.org/10.7567/jjap.52.11nc03 Zobrazit plný text záznamu