PARAMETRIC AMPLIFICATION OF A MEMS GYROSCOPE BY CAPACITANCE MODULATION
| Autor: | Burgess R. Johnson |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Physics
Acoustics and Ultrasonics business.industry Vibrating structure gyroscope Gyroscope Sense (electronics) Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Signal Capacitance Transfer function law.invention Arts and Humanities (miscellaneous) Control theory Modulation law Optoelectronics Parametric oscillator business |
| Zdroj: | The Journal of the Acoustical Society of America. 131:3190 |
| ISSN: | 0001-4966 |
| Popis: | Parametric amplification of the output of a MEMS gyroscope is achieved by modulating the sense capacitance, or an auxiliary capacitance having an applied DC voltage. The capacitance modulation is produced by the driven motion of the gyroscope mechanism, so the pump signal of the parametric amplifier is not subject to phase errors in the electronics. The capacitance modulation affects the mechanical gain of the sensor (transfer function from input force to sensor mechanism displacement), as well as the electrical gain of the sensor (transfer function from sensor mechanism displacement to output electrical signal). The mechanical and electrical gains of the sensor become phase-dependent, so the Coriolis rate signal can be amplified while the unwanted quadrature-phase signal is attenuated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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