Structural and electrical properties of Li-doped ZnO films

Autor: Jae-Gil Lee, Su-Keun Eom, Jun-Seok Jeong, Dong-Hwan Kim, Kwang-Seok Seo, Ho-Young Cha
Rok vydání: 2017
Předmět:
Zdroj: Journal of the Korean Physical Society. 71:697-700
ISSN: 1976-8524
0374-4884
Popis: In this study, we investigated the effects of highly doped carbon (C) buffer on the microwave performance of AlGaN/GaN-on-Si high electron mobility transistor (HEMT).We fabricated AlGaN/GaN-on-Si HEMTs with two different buffer structures. One structure had an un-doped buffer layer and the other structure had C-doped buffer layer with the doping concentration of ~1 × 1019 cm −3 with GaN channel thickness of 350 nm. Despite higher leakage current, the device fabricated on the un-doped buffer structure exhibited better transfer and current collapse characteristics which, in turn, resulted in superior small-signal characteristics and radio frequency (RF) output power. Photoluminescence and secondary ion mass spectrometry measurements were carried out to investigate the effects of the highly-doped C buffer on microwave characteristics.
Databáze: OpenAIRE