Parametric composite limited yield index for functional circuits yield prediction

Autor: George E. Rudgers, Jiun-Hsin Liao, Fred J. Towler, R. Logan, Ishtiaq Ahsan
Rok vydání: 2011
Předmět:
Zdroj: 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
DOI: 10.1109/asmc.2011.5898160
Popis: In this paper we present an early detection mechanism for semiconductor circuit yield prediction and tracking. Several discrete devices used as components of functional circuits have been examined by their first-metal level test data and correlated to the higher metal level functional yield. A concept of Device Health Composite Yield is also introduced in this paper.
Databáze: OpenAIRE