A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors

Autor:	Shingo Uchiyama, Joji Yamaguchi, Etsu Hashimoto, Yoshito Jin, Kei Kuwabara, Mitsuo Usui, Takako Ishihara, Naru Nemoto, Tomomi Sakata, Nakajima Mitsumasa
Rok vydání:	2013
Předmět:	Microelectromechanical systems Optics Tilt (optics) Reliability (semiconductor) Materials science business.industry Physics::Optics Surface charge Dielectric business Dielectric surface Term (time)
Zdroj:	2013 International Conference on Optical MEMS and Nanophotonics (OMN).
DOI:	10.1109/omn.2013.6659038
Popis:	Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::69fb92728a6513548866ed2179391add https://doi.org/10.1109/omn.2013.6659038 Zobrazit plný text záznamu