Fabrication of plasmonic nanopore by using electron beam irradiation for optical bio-sensor
| Autor: | Chul Hee Han, Soo Bong Choi, Yong-Sang Kim, Seong Soo Choi, Doo Jae Park, Seh Joong Oh, Myoung Jin Park, Nam Kyou Park |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry Scanning electron microscope 02 engineering and technology Surface-enhanced Raman spectroscopy Sputter deposition 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam 0104 chemical sciences Nanopore Optics Transmission electron microscopy Cathode ray 0210 nano-technology business Plasmon |
| Zdroj: | Optical Sensors 2017. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.2264986 |
| Popis: | The Au nano-hole surrounded by the periodic nano-patterns would provide the enhanced optical intensity. Hence, the nano-hole surrounded with periodic groove patterns can be utilized as single molecule nanobio optical sensor device. In this report, the nano-hole on the electron beam induced membrane surrounded by periodic groove patterns were fabricated by focused ion beam technique (FIB), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). Initially, the Au films with three different thickness of 40 nm, 60 nm, and 200 nm were deposited on the SiN film by using an electron beam sputter-deposition technique, followed by removal of the supporting SiN film. The nanopore was formed on the electron beam induced membrane under the FESEM electron beam irradiation. Nanopore formation inside the Au aperture was controlled down to a few nanometer, by electron beam irradiations. The optical intensities from the biomolecules on the surfaces including Au coated pyramid with periodic groove patterns were investigated via surface enhanced Raman spectroscopy (SERS). The fabricated nanopore surrounded by periodic patterns can be utilized as a next generation single molecule bio optical sensor. |
| Databáze: | OpenAIRE |
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