Development of Functional Coatings by Electron-Beam Sputtering of Sol-Gel Targets

Autor:	D. L. Kovalenko, V. E. Gaishun, Yanina A. Kosenok, Vasily Vaskevich, Alexandr V. Rogachev, Dumitru Luca, Alexey Rusykin, Larisa Sudnik
Rok vydání:	2017
Předmět:	Morphology (linguistics) Materials science business.industry Sputtering Cathode ray Optoelectronics business Absorption (electromagnetic radiation) Reflectivity Refractive index Sol-gel
Zdroj:	Advances in Intelligent Systems and Computing ISBN: 9783319674582
DOI:	10.1007/978-3-319-67459-9_9
Popis:	To obtain coatings by electron-beam sputtering have been developed and synthesized by a sol-gel method based on a target of SiO2, TiO2, ZrO2, ZrO2/In2O3, Al2O3. Spectroscopic studies conducted for formed coatings and identified their main optical characteristics such as refractive index, reflectance, transmission and absorption. Researches morphology layers formed by atomic force.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::69d890c02eda58c5ae9cbf9176a2aa24 https://doi.org/10.1007/978-3-319-67459-9_9 Zobrazit plný text záznamu