Research of the structure of a-Cfilms by the Raman spectroscopy method
| Autor: | Aleksander Ryaguzov, Aliya Assembayeva, N. R. Guseinov, Markizat Myrzabekova, Renata Nemkayeva |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Materials science Silicon Analytical chemistry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Decomposition symbols.namesake chemistry Amorphous carbon Sputtering 0103 physical sciences Cavity magnetron symbols 0210 nano-technology Dispersion (chemistry) Raman spectroscopy Quartz |
| Zdroj: | Materials Today: Proceedings. 25:58-63 |
| ISSN: | 2214-7853 |
| Popis: | The paper considers the influence of palladium nanoparticles on the formation of the structure of amorphous carbon films (a-C). Synthesis of a-C films was carried out by magnetron ion-plasma sputtering of a combined target in an argon atmosphere on quartz and silicon substrates. The results of Raman studies of a-C films modified with Pd nanoparticles using 473 nm and 633 nm lasers are presented. Analysis of the G peak dispersion revealed a significant difference in the structure formation of the carbon matrix in a-C films on silicon and quartz substrates. In addition, the decomposition of the G peak showed a dependence of the local structure of the synthesized a-C films on Pd concentration. |
| Databáze: | OpenAIRE |
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