Demonstration of Ethanol and JP-8 Fuel Atomization Using Micromachined Silicon Multiplexed Electrosprays

Autor:	Israel Boniche, C. M. Waits
Rok vydání:	2009
Předmět:	Microelectromechanical systems Fabrication Materials science Silicon chemistry.chemical_element Nanotechnology law.invention Surface micromachining chemistry law Deep reactive-ion etching Reactive-ion etching Photolithography Microfabrication
DOI:	10.21236/ada499534
Popis:	This work discusses the fabrication and experimental testing of multiplexed electrospray (ESpray) devices micromachined in silicon substrates. Variations to the experimental test stands from previous work demonstrating Ethanol spraying are described for the successful demonstration of JP-8 spraying. Five different ESpray devices were microfabricated to gain an understanding of the operating limits for stable electrospraying. The microfabrication of ESpray devices consists of independently fabricating its two components (extractor and nozzle array layers) with standard photolithography and deep reactive ion etching (DRIE) of silicon substrates. Precise alignment ( 30 min) for both Ethanol and JP-8 tests.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::699f4872f17c47ec6b45be2762b7034b https://doi.org/10.21236/ada499534 Zobrazit plný text záznamu