Research of scanning slit with minimal penumbra of blades edge in lithography
| Autor: | 黄惠杰 Huang Huijie, 张 方 Zhang Fang, 林栋梁 Lin Dongliang |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Materials science
business.industry Penumbra 02 engineering and technology Edge (geometry) 021001 nanoscience & nanotechnology 01 natural sciences Slit Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials 010309 optics Optics 0103 physical sciences 0210 nano-technology business Lithography |
| Zdroj: | Optics and Precision Engineering. 26:1046-1053 |
| ISSN: | 1004-924X |
| DOI: | 10.3788/ope.20182605.1046 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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