Nanofabrication and rapid imaging with a scanning tunneling microscope
| Autor: | E. E. Ehrichs, M. Trochet, S. Rubel, A. L. de Lozanne, Walter F. Smith |
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| Rok vydání: | 1994 |
| Předmět: |
Materials science
Scanning electron microscope General Engineering Analytical chemistry Nanowire chemistry.chemical_element Chemical vapor deposition Electrochemical scanning tunneling microscope law.invention Nickel Nanolithography chemistry law Electrical measurements Scanning tunneling microscope |
| Zdroj: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:1894 |
| ISSN: | 0734-211X |
| Popis: | Nanowires have been made by decomposing organometallic gases in a UHV scanning tunneling microscope (STM); this process is a form of chemical vapor deposition (CVD). Our STM is coupled to a commercial scanning electron microscope (SEM), which allows us to align the tip with pre‐existing contact pads for electrical measurements of the nanowires. Thus four‐contact measurements on two wires have been performed, a first for STM‐fabricated structures. The resistivity of the first wire made from a nickel carbonyl precursor gas is 34±10 μΩ cm at room temperature. This is remarkably close to the bulk value of 7.8 μΩ cm, since the wire is only 5 nm thick, 190 nm wide and 3.7 μm long. This indicates that the nickel deposits are fairly pure, and is consistent with Auger analysis made on micron‐size deposits: there is at least 95% nickel in these deposits. This is a substantial improvement over previous results from our group and the few other groups using this technique. The second wire is 1.45 μm long and 100 nm wi... |
| Databáze: | OpenAIRE |
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