LASER PROCESSING OF DIAMOND AND DIAMOND-LIKE FILMS
| Autor: | Sergej M. Pimenov, V.Yu. Armeyev, A.V. Kuzmichov, V.P. Ageev, V. G. Ralchenko, N I Chapliev |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Materials science
Diamond-like carbon business.industry Mechanical Engineering Material properties of diamond chemistry.chemical_element Diamond Nanotechnology engineering.material Isotropic etching Industrial and Manufacturing Engineering Carbon film Amorphous carbon chemistry Mechanics of Materials Etching (microfabrication) engineering Optoelectronics General Materials Science business Carbon |
| Zdroj: | Materials and Manufacturing Processes. 8:1-8 |
| ISSN: | 1532-2475 1042-6914 |
| DOI: | 10.1080/10426919308934810 |
| Popis: | Laser processing of polycrystalline diamond and amorphous carbon films is shown to be a promising technology for micropatterning of these materials in electronics and other applications. By using excimer lasers, holes and pits have been formed in 10-60 μm thick diamond films by physical etching with ablation rates of up to 300 nm/pulse. The channels of micrometer scale width were created in diamond-like carbon films on silicon by chemical etching in oxygen by the scanning with a cw Ar+ laser beam. At laser powers below the etching threshold, a transformation of amorphous carbon to graphitic carbon allows the formation of conductive lines of different geometry in dielectric carbon layers. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|