| Autor: |
Wayne Isami Imaino, I. McFadyen, W.Y. Lee, P. Webb, Toshiki Hirano, Surya Pattanaik, J. Hong, Wen-Han Juan, Tzong-Shii Pan, Long-Sheng Fan, Satya Prakash Arya, Francis Chee-Shuen Lee, Tetsuo Semba, Roger Wood, S. Chan |
| Rok vydání: |
1999 |
| Předmět: |
|
| Zdroj: |
IEEE Transactions on Magnetics. 35:1000-1005 |
| ISSN: |
0018-9464 |
| DOI: |
10.1109/20.753823 |
| Popis: |
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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