Normal-stress Semiconductor Sensor Using a Combined Square-shaped van der Pauw Structure

Autor:	Chun-Hyung Cho, Jonghoek Kim, Hyuk-Kee Sung
Rok vydání:	2020
Předmět:	Materials science Van der Pauw method Stress sensor Condensed matter physics Structure (category theory) Electrical and Electronic Engineering Semiconductor sensor Square (algebra) Electronic Optical and Magnetic Materials
Zdroj:	JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE. 20:135-140
ISSN:	2233-4866 1598-1657
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6945865f093351166137ce91c573f741 https://doi.org/10.5573/jsts.2020.20.2.135 Zobrazit plný text záznamu