Micro welding of aluminum for post process electrode gap reduction using femtosecond laser

Autor:	M. Rennau, R. Ebert, Danny Reuter, Christoph Meinecke, A. Bertz, Mathias Müller, Thomas Gessner, H. Exner
Rok vydání:	2015
Předmět:	Microelectromechanical systems Materials science business.industry Capacitive sensing Laser beam welding Hardware_GENERAL Femtosecond Trench Electrode Hardware_INTEGRATEDCIRCUITS Electronic engineering Deep reactive-ion etching Optoelectronics business Gap reduction
Zdroj:	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
DOI:	10.1109/transducers.2015.7181183
Popis:	This paper presents a new technology, which allows the reduction of the micro dimensional trench width below the technological limitations of the Deep Reactive Ion Etching (DRIE) process. The high-accuracy and high-throughput femtosecond laser-micro-welding of aluminum was performed for the first time by Micro Electrical Mechanical System (MEMS) fabrication to realize this permanent trench width reduction. Therefore, this technology has been applied for the electrode gap reduction of high precision vibration sensors, based on the capacitive working principle, resulting in a fourfold improvement of the sensitivity without changing the size of the sensor chip itself.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::691f9793a273f659d55f3775c43a4410 https://doi.org/10.1109/transducers.2015.7181183 Zobrazit plný text záznamu