Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing
| Autor: | Tong Jiang, Bing-Rong Gao, Li-Gang Niu, Yan-Hao Yu, Zhen-Nan Tian |
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| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science Scale (ratio) Phase (waves) 02 engineering and technology Zone plate Diffraction efficiency 01 natural sciences law.invention 010309 optics symbols.namesake High fidelity Optics law 0103 physical sciences Electrical and Electronic Engineering Physical and Theoretical Chemistry business.industry 021001 nanoscience & nanotechnology Galvanometer Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Femtosecond symbols 0210 nano-technology business |
| Zdroj: | Optics Communications. 362:69-72 |
| ISSN: | 0030-4018 |
| DOI: | 10.1016/j.optcom.2015.08.039 |
| Popis: | We report on the fabrication of large-scale eight-level phase-type Fresnel zone plate arrays (FZPAs) by femtosecond-laser direct writing technology. A high-speed galvanometer scanning system was used to fabricate each Fresnel zone plate to realize high fabrication efficiency. To overcome the limited fabrication scale in the case of galvanometer scanning, inter-plate movements were controlled by multi-axis air-bearing precise positioning stages. With the system, FZPAs whose fill-factor was designed to be 100% realized a diffraction efficiency of 89%. The focusing and imaging properties of the FZPAs were also evaluated, and the FZPAs showed high fidelity. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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