A 125-GHz Permittivity Sensor With Read-Out Circuit in a 250-nm SiGe BiCMOS Technology
| Autor: | Dietmar Kissinger, J. Christoph Scheytt, Robert Weigel, Benjamin Laemmle, Klaus Schmalz |
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| Rok vydání: | 2013 |
| Předmět: |
Physics
Permittivity Radiation Silicon business.industry Electrical engineering Binary number chemistry.chemical_element Dielectric Condensed Matter Physics Printed circuit board chemistry Transmission line Personal computer Optoelectronics Electrical and Electronic Engineering Reflection coefficient business |
| Zdroj: | IEEE Transactions on Microwave Theory and Techniques. 61:2185-2194 |
| ISSN: | 1557-9670 0018-9480 |
| DOI: | 10.1109/tmtt.2013.2253792 |
| Popis: | In this paper, an integrated dielectric sensor with a read-out circuit in an unmodified SiGe BiCMOS technology at 125 GHz is presented. The sensor consists of a 500- $\mu{\hbox {m}}$ shorted half-wave coplanar-waveguide transmission line in the uppermost metal layer of the silicon process, while the read-out is obtained by reflection coefficient measurement with an integrated reflectometer and a signal source. The reflectometer is verified with a circuit breakout including an integrated dummy sensor. The reflectometer is able to measure the phase of the reflection coefficient from 117 to 134 GHz with a resolution of 0.1 $^{\circ}$ and a standard deviation of 0.082 $^{\circ}$ . The integrated sensor with the reflectometer circuit have been fabricated in a 190-GHz ${ f}_{ T}$ SiGe:C BiCMOS technology. It spans an area of 1.4 ${\hbox {mm}}^{2}$ and consumes 75 mA from a 3.3-V supply. The circuit has been assembled on a printed circuit board for characterization by immersion into test liquids. The sensor is controlled by a controller board and a personal computer enabling a measurement time of up to 1 ms per frequency point. Functionality of the sensor is demonstrated from 118 to 133 GHz with immersion of the sensor into different binary methanol–ethanol mixtures, showing good correlation between theory and measurement. The sensor shows a standard deviation of the measured phase of 0.220 $^{\circ}$ and is able to detect a difference in $\epsilon_{r}^{\prime}$ of 0.0125. |
| Databáze: | OpenAIRE |
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