Self-organization in porous silicon formation

Autor: Vijay A. Singh, George C. John
Rok vydání: 1997
Předmět:
Zdroj: Physical Review B. 56:4638-4641
ISSN: 1095-3795
0163-1829
DOI: 10.1103/physrevb.56.4638
Popis: We investigate the diffusion-induced nucleation model for the formation of porous silicon. We show that simulations based on this model can explain experimental features such as (i) a constant porosity profile, (ii) a planar film front, and (iii) the effect of the surface roughness on the porosity profile. We show that for a critical roughness the surface nanoporous layer disappears. Further, these simulations highlight aspects of self-organization in the pore formation process.
Databáze: OpenAIRE