Three-dimensional imaging at the mesoscopic scale using STEM-in-SEM

Autor:	Catherine Gauthier, Karine Masenelli-Varlot, P. Jornsanoh, G. Thollet
Rok vydání:	2009
Předmět:	Mesoscopic physics Materials science Optics Electron tomography Scale (ratio) Transmission electron microscopy business.industry Scanning electron microscope Physics::Medical Physics Tomography business Environmental scanning electron microscope Image resolution
Zdroj:	EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany ISBN: 9783540851547
DOI:	10.1007/978-3-540-85156-1_169
Popis:	Tomography is a very powerful tool to investigate the three-dimensional structures of biological or materials specimens. However, the mesoscopic scale is covered neither by X-Ray tomography (insufficient spatial resolution) nor by electron tomography in a transmission electron microscope (too small reconstructed volume). We developed an electron tomography stage in a scanning electron microscope in order to obtain the missing information at the mesoscopic scale [1].
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::68eba9d05ca25bd7ab1713efa3b6d0c5 https://doi.org/10.1007/978-3-540-85156-1_169 Zobrazit plný text záznamu