Thermal stability and vibrational spectroscopy of N–O shallow donor centers in silicon
| Autor: | Hans Edwin Wagner, Hans Christian Alt |
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| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Journal of Applied Physics. 106:103511 |
| ISSN: | 1089-7550 0021-8979 |
| DOI: | 10.1063/1.3253759 |
| Popis: | N–O-related shallow donors in nitrogen-doped Czochralski silicon have been studied by infrared spectroscopy. Quasithermal equilibrium states were established by long-term thermal annealing in the temperature range from 600to1000°C. By quantitative analysis of the 1s→2p± far-infrared electronic transitions between 230 and 250cm−1, it is found that the formation and decay characteristics of these centers do not correspond to theoretical predictions. All complexes investigated show a monotonic decrease for annealing temperatures above 600°C. In particular, the dominant NO2 complex exhibits a pronounced biexponential decay behavior. Based on the characteristic thermal fingerprint of the individual shallow donor species, associated local vibrational modes in the midinfrared were investigated. Two bands at 1070 and 860cm−1 can be assigned to NO2, the center with the highest concentration variation in the relevant temperature range between 600 and 800°C. These frequencies match favorably with recent calculations... |
| Databáze: | OpenAIRE |
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