Study on the Crystallinity Change Caused by Heat Treatment of AlN Thin Films Grown by Using Pulsed Sputter Deposition

Autor:	Dongwan Ko, Sung-Min Cho, Sangtae Lee, Junseck Choi, Jiho Chang
Rok vydání:	2018
Předmět:	Crystallinity Materials science Annealing (metallurgy) General Physics and Astronomy Composite material Sputter deposition Thin film
Zdroj:	New Physics: Sae Mulli. 68:20-24
ISSN:	2289-0041 0374-4914
DOI:	10.3938/npsm.68.20
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6884ff11cf0eccd6d50d80fd97e6eb74 https://doi.org/10.3938/npsm.68.20 Zobrazit plný text záznamu