A Stretchable Multimodal Sensor for Soft Robotic Applications
| Autor: | Weiliang Xu, Leo K. Cheng, Steven Dirven, Sattar Din |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Fabrication Capacitive sensing 010401 analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Pressure sensor Flexible electronics Viscoelasticity 0104 chemical sciences Machining visual_art visual_art.visual_art_medium Shear stress Electronic engineering Electrical and Electronic Engineering Composite material 0210 nano-technology Sheet metal Instrumentation |
| Zdroj: | IEEE Sensors Journal. 17:5678-5686 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2017.2726099 |
| Popis: | This paper presents the design, fabrication, and characterization of a multimodal sensor with integrated stretchable meandered interconnects for uniaxial strain, pressure, and uniaxial shear stress measurements. It is designed based on a capacitive sensing principle for embedded deformable sensing applications. A photolithographic process is used along with laser machining and sheet metal forming technique to pattern sensor elements together with stretchable grid-based interconnects on a thin sheet of copper polyimide laminate as a base material in a single process. The structure is embedded in a soft stretchable Ecoflex and PDMS silicon rubber encapsulation. The strain, pressure, and shear stress sensors are characterized up to 9%, 25 kPa, and ±11 kPa of maximum loading, respectively. The strain sensor exhibits an almost linear response to stretching with an average sensitivity of −28.9 fF%−1. The pressure sensor, however, shows a nonlinear and significant hysteresis characteristic due to nonlinear and viscoelastic property of the silicon rubber encapsulation. An average best-fit straight line sensitivity of 30.9 fFkPa−1 was recorded. The sensitivity of shear stress sensor is found to be 8.1 fFkPa−1. The three sensing elements also demonstrate a good cross-sensitivity performance of 3.1% on average. This paper proves that a common flexible printed circuit board (PCB) base material could be transformed into stretchable circuits with integrated multimodal sensor using established PCB fabrication technique, laser machining, and sheet metal forming method. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|