| Autor: |
Joseph J. Kopanski, H.-P. Huber, Pavel Kabos, Atif Imtiaz, Thomas M. Wallis, A. E. Curtin, Ferry Kienberger |
| Rok vydání: |
2012 |
| Předmět: |
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| Zdroj: |
2012 Conference on Precision electromagnetic Measurements. |
| DOI: |
10.1109/cpem.2012.6251036 |
| Popis: |
Two techniques are described for calibrating a scanning microwave microscope (SMM). The first technique enables spatially-resolved absolute capacitance measurements on the attofarad-to-femtofarad scale. The second technique enables profiling of dopant concentrations between 1016 to 1020 dopant atoms per cm3. Notably, the sensitivity of the instrument to different dopant concentrations may be tuned by adjusting the SMM operating frequency. Both calibration techniques involve the use of specialized reference samples, in conjunction with modeling and data analysis. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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