Amorphous Silicon Carbide as a Non-Biofouling Structural Material for Biomedical Microdevices
| Autor: | Anna Dubnisheva, Christian A. Zorman, Jiangang Du, Aaron J. Fleischman, Shuvo Roy, William H. Fissell, Abigail N. Eldridge, Sargum Manley, Matt Johnston |
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| Rok vydání: | 2012 |
| Předmět: |
Amorphous silicon
Materials science Silicon Silicon dioxide Mechanical Engineering Nanocrystalline silicon chemistry.chemical_element Condensed Matter Physics Carbide Amorphous solid chemistry.chemical_compound chemistry Mechanics of Materials Plasma-enhanced chemical vapor deposition Silicon carbide General Materials Science Composite material |
| Zdroj: | Materials Science Forum. :537-540 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.717-720.537 |
| Popis: | This paper details the development of amorphous hydrogenated silicon carbide (a-SiC:H) films as structural material that is resistant to biofouling. The a-SiC:H films were deposited by PECVD and evaluated for their mechanical and anti-biofouling properties. It was found that the as-deposited films exhibited compressive residual stresses that could be converted to moderate tensile stresses upon a post deposition anneal. The amorphous films exhibited a much lower Young’s modulus but similar burst stress when compared to polycrystalline 3C-SiC films of like thickness. The as-deposited a-SiC:H films were more resistant to biofouling than silicon and silicon dioxide surfaces. Coating the a-SiC:H films with polyethylene glycol (PEG) significantly improved the anti-fouling characteristics for extended periods. |
| Databáze: | OpenAIRE |
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