New long trace profiler based on phase plate diffraction for optical metrology of SSRF
| Autor: | Hongxin Luo, Hongjie Xu, Guo-Hao Du, Li Wen, Tiqiao Xiao, Shaojian Xia, Danhua Zeng |
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| Rok vydání: | 2006 |
| Předmět: | |
| Zdroj: | Review of Scientific Instruments. 77:093305 |
| ISSN: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.2186253 |
| Popis: | A long trace profiler LTP-1200, with a novel f-θ system based on phase plate diffraction and a scanning range up to 1200mm, has been developed at Shanghai Synchrotron Radiation Facility. The central dark line in the diffraction pattern generated by a π phase plate is taken as the positioning benchmark. A magnet levitated linear rail with very high accuracy is used. A granite bench is employed to reduce deformation due to self-gravity of the rail. The focused diffraction pattern is recorded with an area charge-coupled device. The generalized regression neural network algorithm is adopted to improve the beam positioning precision. The static stability of LTP-1200 in 5h is 0.14μrad, and the repeatability reaches 0.05μrad in a common laboratory without any special control of temperature, air turbulence, etc. Calibration tests were carried out with a high precision autocollimator and a standard spherical mirror, respectively. Results show the high performance and reliability of the LTP-1200. |
| Databáze: | OpenAIRE |
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