Development of integral passive components for multilayer organic MCMs at millimeter wave frequencies
| Autor: | Anh-Vu Pham, L. Sprinceanu, R. Saia, V. Krishnamurthy, B. Schmanski, W. Marcinkewicz, D. Bates |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Materials science
business.industry Electrical engineering Integrated circuit Kapton law.invention chemistry.chemical_compound Tantalum nitride chemistry law Extremely high frequency Return loss Optoelectronics Integrated circuit packaging Electrical and Electronic Engineering Resistor business Microwave |
| Zdroj: | IEEE Transactions on Advanced Packaging. 25:98-101 |
| ISSN: | 1521-3323 |
| DOI: | 10.1109/tadvp.2002.1017691 |
| Popis: | We present the design and development of Ta/sub 2/N thin-film resistors for the multilayer organic multichip module (MCM) at microwave and millimeter wave frequencies. The Ta/sub 2/N thin-film resistors are integrated directly onto multilayer Kapton films and achieve a resistivity of 12.5 /spl Omega//sq. to 25 /spl Omega//sq. Several Ta/sub 2/N thin-film resistor structures have been fabricated and electrically characterized up to 50 GHz to develop design rules for this process. For the first time, an ultra-wide band terminator has been developed and integrated on Kapton flex using Ta/sub 2/N thin-film resistors. The measured results of this circuit demonstrate a return loss of less than 20-dB over a 50-GHz bandwidth. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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