Material-specific high-resolution extreme ultraviolet microscopy using a high-order harmonic source

Autor:	Wilhelm Eschen, Lars Loetgering, Vittoria Schuster, Robert Klas, Alexander Kirsche, Lutz Berthold, Michael Steinert, Thomas Pertsch, Michael Krause, Jens Limpert, Jan Rothhardt
Rok vydání:	2022
Zdroj:	International Conference on Extreme Ultraviolet Lithography 2022.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::683c99845327a0083551c6f90d4ef5de https://doi.org/10.1117/12.2641705 Zobrazit plný text záznamu