Numerical simulation of micro-fabricated zero mass-flux jet actuators
Autor: | John Reizes, Samuel George Mallinson, Chee Yee Kwok |
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Rok vydání: | 2003 |
Předmět: |
Mass flux
Microelectromechanical systems Engineering Computer simulation business.industry Metals and Alloys Mechanical engineering Computational fluid dynamics Condensed Matter Physics Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials Flow control (fluid) Synthetic jet Electrical and Electronic Engineering business Actuator Instrumentation Body orifice |
Zdroj: | Sensors and Actuators A: Physical. 105:229-236 |
ISSN: | 0924-4247 |
DOI: | 10.1016/s0924-4247(03)00204-8 |
Popis: | Computational fluid dynamics can play an important role in the design of microelectromechanical systems (MEMS)-based actuators, allowing an investigation of the underlying physical behavior of devices before proceeding to expensive manufacturing processes. Here, we present the results of a series of numerical simulations of synthetic jet actuators, so-called because they synthesize jets from the working fluid. The primary characteristic of these actuators is that over a cycle, the net mass flux is zero, yet the mean momentum flux is non-zero. The simulations consider both the internal and external flow-fields of a micro-scaled device, with the membrane motion specified using a simplified structural analysis. Key features of the flow in the external, orifice and cavity regions are presented and discussed. The actuator output is observed to vary linearly with a non-dimensional input parameter, and this may guide the design of flow control systems that use synthetic jet actuators. Finally, our fabrication strategy for a MEMS-based synthetic jet actuator is presented. |
Databáze: | OpenAIRE |
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