Multiphysics simulation and analysis of MEMS-based chevron shaped electro-thermal actuator for quad-way switching application

Autor:	Amruth S. Pawar, L.N. Chandrashekar, G. Nithya, K Naveen Kumar, M. Madhushankara, Shridhar Nayak
Rok vydání:	2023
Předmět:	General Medicine
Zdroj:	Materials Today: Proceedings. 80:1177-1184
ISSN:	2214-7853
DOI:	10.1016/j.matpr.2022.12.164
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::67d774640b151f3a03dc62fb0450b34e https://doi.org/10.1016/j.matpr.2022.12.164 Zobrazit plný text záznamu Full Text from ScienceDirect