Study on fabrication tolerances of SOI based directional couplers and ring resonators
| Autor: | Andreas Prinzen, Michael Waldow, Heinrich Kurz, Jens Bolten |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Fabrication Silicon business.industry Physics::Optics Silicon on insulator chemistry.chemical_element Condensed Matter Physics Atomic and Molecular Physics and Optics Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Resonator Optics chemistry law Slab Power dividers and directional couplers Electrical and Electronic Engineering business Waveguide |
| Zdroj: | Microelectronic Engineering. 121:51-54 |
| ISSN: | 0167-9317 |
| Popis: | In this study the effect of waveguide shape deviation due to manufacturing tolerances on the performance of lateral directional couplers for ring resonators based on SOI-rib-waveguides is investigated. The effect of deviations of the waveguide width, slab thickness and the waveguide sidewall angle and wet chemical cleaning procedures on the device performance are investigated by using Full Wave 3D Finite Element Method. Furthermore deviations of the top silicon thickness determined by the substrate quality are included in the investigations. Possible measures against systematic process tolerances are proposed and modifications of the fabrication process to improve device stability and reproducibility are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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