Crystallization of amorphous hydrogenated silicon (a-Si:H) films under irradiation with femtosecond laser pulses

Autor: V. P. Belik, R. S. Popov, M. A. Petrov, A. V. Kukin, Oleg S. Vasyutinskii, E. I. Terukov
Rok vydání: 2016
Předmět:
Zdroj: Technical Physics Letters. 42:788-791
ISSN: 1090-6533
1063-7850
DOI: 10.1134/s1063785016080058
Popis: Crystallization of thin films of amorphous hydrogenated silicon under the irradiation of femtosecond laser pulses has been studied. It was found that the crystallization has a clearly pronounced threshold nature and depends on the laser emission wavelength. As shown the best results are achieved in crystallization at the laser wavelength range of 740–760 nm.
Databáze: OpenAIRE