Building and testing submicrometer metallic (gold) air-bridges for nanotransport applications
| Autor: | T. Borzenko, V. Hock, Georg Schmidt, D. Supp, Laurens W. Molenkamp, Charles Gould |
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| Rok vydání: | 2005 |
| Předmět: |
Fabrication
Materials science business.industry Resonant-tunneling diode Physics::Optics Nanotechnology Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Condensed Matter Physics Acceleration voltage Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Nanoelectronics Quantum dot visual_art Electronic component visual_art.visual_art_medium Optoelectronics Electrical and Electronic Engineering business Lithography Electron-beam lithography |
| Zdroj: | Microelectronic Engineering. :374-380 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2004.12.050 |
| Popis: | The properties of submicrometer gold air-bridges are investigated for their suitability as elements of an electronic device. The fabrication procedure of a gated vertical quantum dot resonant tunneling diode structure implementing air-bridges is presented as a demonstration. Our investigations show that air-bridges produced by multiple acceleration voltage lithography exhibit excellent mechanical and electrical stability for nanotransport application. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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