Self-excitation of piezoelectric microbridge resonators by external feedback
| Autor: | Warner J. Venstra, Sywert Brongersma, Mercedes Crego-Calama, Devrez Mehmet Karabacak, H. S. J. van der Zant, R. van Leeuwen |
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| Rok vydání: | 2012 |
| Předmět: |
Microelectromechanical systems
Physics Nanoelectromechanical systems business.industry Feedback loop Condensed Matter Physics Piezoelectricity Atomic and Molecular Physics and Optics Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials Resonator Optoelectronics Fluidics Electrical and Electronic Engineering business Excitation Loop gain |
| Zdroj: | Microelectronic Engineering. 98:463-466 |
| ISSN: | 0167-9317 |
| Popis: | Fluidic energy losses have significantly hindered the wide spread adoption of M/NEMS resonators especially in sensing applications. We apply an external feedback loop to amplify the motion of a microbridge resonator with an integrated piezoelectric actuator. The thermal motion of the device is amplified by positive velocity-proportional feedback, resulting in sustained oscillations. The Q-factor increases with the loop gain by up to a factor of 20 when compared to the open-loop system. |
| Databáze: | OpenAIRE |
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