Thermodynamic Prediction of TaC CVD Process in TaCl5-C3H6-H2 System

Autor:	Kwang-Bo Shim, Jong-Kyoo Park, Kyoon Choi, Nam-Choon Cho, Hyun Mi Kim
Rok vydání:	2018
Předmět:	Economic growth Materials science ComputerApplications_COMPUTERSINOTHERSYSTEMS ComputingMilieux_LEGALASPECTSOFCOMPUTING General Materials Science Christian ministry
Zdroj:	Korean Journal of Materials Research. 28:75-81
ISSN:	2287-7258 1225-0562
Popis:	This work was supported by the Korea Government(Ministry of Trade, Industry and Energy, MOTIE and Defense Acquisition Program Adminstration, DAPA) through Institute of Civil-Military Technology Cooperation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::672fab0ef8f735bb67d100d07a726ff8 https://doi.org/10.3740/mrsk.2018.28.2.75 Zobrazit plný text záznamu