The mathematical model of the kinetics of the process of obtaining the metal arsen for the manufacture of semiconductor materials

Autor:	Alona Pasenko, Olha Novokhatko, Tetjana Kozlovskaya, Oksana Maznytska
Rok vydání:	2017
Předmět:	Materials science Hydrogen Semiconductor materials Kinetics chemistry.chemical_element Chloride Metal Chemical kinetics chemistry Chemical engineering Scientific method visual_art visual_art.visual_art_medium medicine Arsenic medicine.drug
Zdroj:	2017 International Conference on Modern Electrical and Energy Systems (MEES).
DOI:	10.1109/mees.2017.8248902
Popis:	The mathematical model of the kinetics of the reaction of arsenic chloride reduction by hydrogen is worked out in the paper. The equation of the kinetics of the gas reaction in the flow, occurring with the volume variation, is obtained. The kinetics equation can be used for processing the experimental data of the research of the process of the arsenic chloride reduction to the metal arsen in the technology of semiconductor materials manufacture. The use of the mathematical model of the gas reaction kinetics made it possible to improve the installation for carrying out the process of AsCl3 reduction to metal As by hydrogen.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6715284abfe9bff7be5cece38a474039 https://doi.org/10.1109/mees.2017.8248902 Zobrazit plný text záznamu