Gas analysis using a MEMS linear time-of-flight mass spectrometer
| Autor: | Romain Mahieu, Laurent Duraffourg, Hadley Videlier, Sebastien Vigne, Charles-Marie Tassetti, Thomas Alava, Frédéric Progent |
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| Rok vydání: | 2017 |
| Předmět: |
Chemistry
010401 analytical chemistry Helium ionization detector 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Mass spectrometry 01 natural sciences Ion source 0104 chemical sciences Atmospheric-pressure laser ionization Secondary ion mass spectrometry Ion beam deposition Ionization Physics::Atomic and Molecular Clusters Physics::Atomic Physics Physical and Theoretical Chemistry Atomic physics 0210 nano-technology Instrumentation Spectroscopy Electron ionization |
| Zdroj: | International Journal of Mass Spectrometry. 422:170-176 |
| ISSN: | 1387-3806 |
| DOI: | 10.1016/j.ijms.2017.03.011 |
| Popis: | This paper presents the optimization of the ionization, extraction and focalization of our new generation of microfabricated time-of-flight mass spectrometer (μ-TOF). Using electron impact ionization, we show ionization efficiencies in the range of 1.10−6 ion/neutral, which is in the same order of magnitude as macroscale electron impact ionizers. A generated ion current in the range of a few tens of nanoamperes lead to an ionization yield around 0.1%, in the same range as the best microfabricated ionizers. The extracted and focalized ion beam is collected in a Micro Channel Plate detector and used to record mass spectra. Using decreasingly concentrated gas mixtures, we show the ability of the linear microfabricated time-of-flight mass spectrometer to detect up to 100 ppm of alkanes in helium. This work pulls the μ-TOF one step closer towards a fully integrated portable analytical system. |
| Databáze: | OpenAIRE |
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