Finite element investigations of the dynamical properties of microstructured membranes
| Autor: | M. Kamlah, R. Elsäßer, C. Tsakmakis |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Engineering
Precision engineering business.industry Numerical analysis Mechanics Condensed Matter Physics Finite element method Electronic Optical and Magnetic Materials Connection (mathematics) Vibration Non contact measurement Membrane Optics Hardware and Architecture Miniaturization Electrical and Electronic Engineering business |
| Zdroj: | Microsystem Technologies. 3:171-177 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s005420050076 |
| Popis: | Microstructured membranes (microdia-phragms) are a tool for measuring quantities such as temperature, strain, or density by ultrasound, i.e. without any contact (e.g. by a wire connection). In this paper we study the dynamical properties of such microstructured membranes numerically by means of the finite element method. In particular, we consider the shape of the eigenmodes of the system and study the dependence of the corresponding eigenfrequencies on material and geometry parameters. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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