Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials
| Autor: | V. S. Polyakov, P. G. Sennikov, R. A. Kornev, I. B. Gornushkin |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Hydrogen Health Toxicology and Mutagenesis Condensation Public Health Environmental and Occupational Health Analytical chemistry Halide chemistry.chemical_element Plasma 010403 inorganic & nuclear chemistry 01 natural sciences Pollution 0104 chemical sciences Analytical Chemistry Carbide Nuclear Energy and Engineering chemistry Plasma-enhanced chemical vapor deposition Fluorine Radiology Nuclear Medicine and imaging Monoisotopic mass Spectroscopy |
| Zdroj: | Journal of Radioanalytical and Nuclear Chemistry. 326:407-421 |
| ISSN: | 1588-2780 0236-5731 |
| DOI: | 10.1007/s10967-020-07295-2 |
| Popis: | The composition of hydrogen and hydrogen-methane plasmas containing ~ 10% of BX3, SiX4, GeX4 (X = F, Cl), SF6, MoF6 and WF6 is calculated for the temperature range ~ 300–4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H2 plasma) and their carbides (in H2 + CH4 plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges. |
| Databáze: | OpenAIRE |
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