Characterization of pulsed plasma-ion streams emitted from RPI-type devices applied for material engineering
Autor: | A. V. Tsarenko, V. N. Borisko, V. I. Tereshin, E. Skladnik-Sadowska, Jacek M. Baranowski, O. V. Byrka, M.J. Sadowski |
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Rok vydání: | 2004 |
Předmět: |
Materials science
Analytical chemistry General Physics and Astronomy Energy flux Surfaces and Interfaces General Chemistry Injector Plasma Condensed Matter Physics Surfaces Coatings and Films law.invention Ion Characterization (materials science) Getter law Electromagnetic shielding Electron temperature Atomic physics |
Zdroj: | Applied Surface Science. 238:433-437 |
ISSN: | 0169-4332 |
DOI: | 10.1016/j.apsusc.2004.05.167 |
Popis: | The paper reports on studies of pulsed plasma-ion streams generated by rod plasma injectors (RPI), and particularly by the IBIS device used for modifications of different materials. Measurements showed that the energy flux density can be from 5 to 25 J/cm2, and the corresponding pressure—from 0.5 to 2.5 bars. Spectroscopic measurements showed that the electron concentration (Ne) amounts to (1.5–3.5)×1016 cm−3; and the electron temperature (Te)—to 1.5–6 eV. A study of the interaction of pulsed plasma streams with reversible getters (made of Zr50V50 alloys) showed that a shielding layer has an average density >1017 cm−3 and it reduces the transmitted energy flux considerably (to 30–60%), what makes possible the shielding of material surfaces. |
Databáze: | OpenAIRE |
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