Acceptor activation of Mg-doped GaN by microwave treatment

Autor:	Chih Lih Chiang, Yan-Kuin Su, Tzer Peng Chen, Tzong Liang Tsai, Chih Sung Chang, Kuo Hsin Huang, Shoou-Jinn Chang, Chung Ying Chang
Rok vydání:	2001
Předmět:	Photoluminescence Materials science Physics and Astronomy (miscellaneous) Dopant business.industry Hall effect Doping Optoelectronics business Epitaxy Acceptor Microwave Spectral line
Zdroj:	Applied Physics Letters. 78:312-313
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.1340864
Popis:	A microwave treatment method different from thermal annealing and low-energy electron beam irradiation was proposed to activate Mg dopants in p-type GaN epitaxial layer. From photoluminescence spectra and Hall effect measurements, it was shown that microwave treatment is a very effective way to activate the acceptors in Mg-doped p-type GaN layer. The activation of Mg dopant in p-type GaN layer may be explained as the breaking of magnesium–hydrogen bonding due to the microwave energy absorption.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::66b9e65d3d9de727746d3bf0c7ae70ee https://doi.org/10.1063/1.1340864 Zobrazit plný text záznamu