Topography and Dislocations in (112)B HgCdTe/CdTe/Si

Autor: G. Brill, U. Lee, R. N. Jacobs, L. A. Almeida, Yuanping Chen, M. Jaime-Vasquez, M. Groenert, J. D. Benson, Priyalal Wijewarnasuriya, P. J. Smith, L. O. Bubulac, J. K. Markunas, Andrew J. Stoltz
Rok vydání: 2009
Předmět:
Zdroj: Journal of Electronic Materials. 38:1771-1775
ISSN: 1543-186X
0361-5235
DOI: 10.1007/s11664-009-0758-7
Popis: Scanning electron microscopy (SEM), atomic force microscopy (AFM), and x-ray diffraction (XRD) measurements all indicate an approximate factor of ten increase in the Everson etch pit density (EPD) over standard Nomarski microscopy Everson EPD determination. A new (112)B CdTe/Si EPD etch has also been demonstrated which reduces the surface roughness of the etched epilayer and makes etch pit density determination less problematic.
Databáze: OpenAIRE