Cross-sectional characterization of integrated circuit structures by scanning electron microscopy
| Autor: | G. H. Sarma, A. Vijay Kumar, Ashish John Prabhakar |
|---|---|
| Rok vydání: | 1987 |
| Předmět: |
Scanning probe microscopy
Materials science Optics Electron tomography business.industry Scanning electron microscope Scanning ion-conductance microscopy Scanning confocal electron microscopy Energy filtered transmission electron microscopy General Materials Science Scanning capacitance microscopy business Characterization (materials science) |
| Zdroj: | Journal of Materials Science Letters. 6:633-634 |
| ISSN: | 1573-4811 0261-8028 |
| DOI: | 10.1007/bf01770907 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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