Flexible Polysilicon Strain Gauge Array
| Autor: | Eun Soo Hwang, Yong-Jun Kim |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Silicon business.industry General Engineering General Physics and Astronomy chemistry.chemical_element Gauge (firearms) Surface micromachining Printed circuit board Sensor array chemistry Gauge factor Optoelectronics business Layer (electronics) Strain gauge |
| Zdroj: | Japanese Journal of Applied Physics. 42:L810-L813 |
| ISSN: | 0021-4922 |
| DOI: | 10.1143/jjap.42.l810 |
| Popis: | A flexible polysilicon strain gauge array has been realized using a surface micromachining technique with a SiO2 sacrificial layer. The realized sensor array is mechanically flexible, which can be attached on non-planar surfaces. To realize the flexible strain gauge module, a new packaging scheme using a polyimide circuit board and an oxide based surface-micromachining was developed. The proposed packaging scheme completes the strain sensors and the circuit board on a single process, which eliminates additional assembly and alignment problems. The measured gauge factor shows that it is more sensitive than metal strain gauges. Unlike a single-crystal silicon strain gauge, the proposed polysilicon gauge has no limitations in the direction of strain. |
| Databáze: | OpenAIRE |
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