Plasmonic nanocomposites of zinc oxide and titanium nitride
| Autor: | Benjamin L. Greenberg, Russell J. Holmes, K. Andre Mkhoyan, Nolan M. Concannon, Jacob T. Held, Chad A. Beaudette, Phong H. Nguyen, Uwe Kortshagen, Eray S. Aydil |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Photocurrent
Materials science Nanocomposite business.industry chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics Titanium nitride Surfaces Coatings and Films chemistry.chemical_compound Atomic layer deposition 020401 chemical engineering chemistry Nanocrystal Optoelectronics 0204 chemical engineering Thin film 0210 nano-technology Tin business |
| Zdroj: | Journal of Vacuum Science & Technology A. 38:042404 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias. |
| Databáze: | OpenAIRE |
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