RF reliability of gate last InGaAs nMOSFETs with high-k dielectric

Autor: Guntrade Roll, Lars-Erik Wernersson, Sofia Johannson, Erik Lind, Mikael Egard, Lars Ohlsson
Rok vydání: 2013
Předmět:
Zdroj: 2013 IEEE International Integrated Reliability Workshop Final Report.
Popis: A complete reliability study of the high-frequency characteristics for nMOSFETs on InGaAs channel with Al2O3/HfO2 gate dielectric is presented. DC gate voltage stress causes an increase in the transconductance frequency dispersion. Stress induced border traps degrade the maximum DC-transconductance, but do not react at high frequencies. The main degradation characteristics of the high-frequency measurements can be modeled by the threshold voltage related transconductance shift. The maximum of the cut-off frequency is shifted with stress to higher or lower gate biases, but not decreased.
Databáze: OpenAIRE