Polymeric (SU-8) optical microscanner driven by electrostatic actuation

Autor:	Jun Yop An, Man Geun Kim, Sung-Kil Lee, Min-Ho Jun, Jong-Hyun Lee, Sung-Tae Yang
Rok vydání:	2011
Předmět:	Scanner Fabrication Materials science business.industry Microscanner Low frequency Condensed Matter Physics Electronic Optical and Magnetic Materials Optics Hardware and Architecture Electrode Electrical and Electronic Engineering Actuator business Layer (electronics) Voltage
Zdroj:	Microsystem Technologies. 17:1439-1445
ISSN:	1432-1858 0946-7076
DOI:	10.1007/s00542-011-1329-4
Popis:	A torsional micromechanical scanner was fabricated using photosensitive polymer (SU-8). The scanner consists of two parts; top layer (micro mirror) and bottom layer (an anchor and electrodes). The SU-8 scanner is actuated by electrostatic force generated from the gap-closing electrodes. For the fabricated optical scanner with the mirror area of 3×3 mm2, the experimentally determined scanning angles were 0.85° and 3.1° for 60Hz (non-resonant) and 1.13 kHz (resonant) driving frequencies, respectively, at an input voltage of 160V. A polymer-based actuator offers advantages including a low-cost fabrication process and low frequency operation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6654cb997884edf51bbe1c166d9e9572 https://doi.org/10.1007/s00542-011-1329-4 Zobrazit plný text záznamu Full text from SpringerLink